Inventor
HIRAHARA ROBERT T
US10 patents
⚠️ This page may combine multiple inventors who share the name “HIRAHARA ROBERT T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS9349630B2May 24, 2016
Methods and apparatus for electrostatic chuck repair and refurbishment
APPLIED MATERIALS INC14 citations83
US11114326B2Sep 7, 2021
Substrate chucking and dechucking methods
APPLIED MATERIALS INC6 citations71
US9613846B2Apr 4, 2017
Pad design for electrostatic chuck surface
APPLIED MATERIALS INC5 citations71
US10177014B2Jan 8, 2019
Thermal radiation barrier for substrate processing chamber components
APPLIED MATERIALS INC2 citations70
US10347522B2Jul 9, 2019
Method to remove residual charge on a electrostatic chuck during the de-chucking step
APPLIED MATERIALS INC0 citations51
US10049908B2Aug 14, 2018
Methods and apparatus for electrostatic chuck repair and refurbishment
APPLIED MATERIALS INC1 citations51