P

Inventor

FUNAKOSHI TOMOHIRO

JP15 patents
⚠️ This page may combine multiple inventors who share the name “FUNAKOSHI TOMOHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

7 patents
US7884948B2Feb 8, 2011

Surface inspection tool and surface inspection method

HITACHI HIGH TECH CORP7 citations83
US7606409B2Oct 20, 2009

Data processing equipment, inspection assistance system, and data processing method

HITACHI HIGH TECH CORP10 citations83
US9224575B2Dec 29, 2015

Charged particle beam device and overlay misalignment measurement method

HITACHI HIGH TECH CORP3 citations62
US8041443B2Oct 18, 2011

Surface defect data display and management system and a method of displaying and managing a surface defect data

HITACHI HIGH TECH CORP5 citations61
US7885789B2Feb 8, 2011

Recipe parameter management system and recipe parameter management method

HITACHI HIGH TECH CORP4 citations61
US8358406B2Jan 22, 2013

Defect inspection method and defect inspection system

HITACHI HIGH TECH CORP2 citations60
US10141159B2Nov 27, 2018

Sample observation device having a selectable acceleration voltage

HITACHI HIGH TECH CORP0 citations38

MIYOSHI YUJI

2 patents
US8189205B2May 29, 2012

Surface inspection tool and surface inspection method

MIYOSHI YUJI2 citations61
US8462352B2Jun 11, 2013

Surface inspection tool and surface inspection method

MIYOSHI YUJI0 citations51

SAKAI TSUNEHIRO

1 patent
US8995748B2Mar 31, 2015

Defect image processing apparatus, defect image processing method, semiconductor defect classifying apparatus, and semiconductor defect classifying method

SAKAI TSUNEHIRO7 citations76

ISOMAE YUYA

1 patent
US8625906B2Jan 7, 2014

Image classification standard update method, program, and image classification device

ISOMAE YUYA4 citations64

TOYODA YASUTAKA

1 patent
US8653456B2Feb 18, 2014

Pattern inspection method, pattern inspection program, and electronic device inspection system

TOYODA YASUTAKA3 citations62

ONO MAKOTO

1 patent
US8290241B2Oct 16, 2012

Analyzing apparatus, program, defect inspection apparatus, defect review apparatus, analysis system, and analysis method

ONO MAKOTO2 citations61

KONISHI JUNKO

1 patent
US8472696B2Jun 25, 2013

Observation condition determination support device and observation condition determination support method

KONISHI JUNKO3 citations54

FUNAKOSHI TOMOHIRO

1 patent
US8209135B2Jun 26, 2012

Wafer inspection data handling and defect review tool

FUNAKOSHI TOMOHIRO4 citations53