Inventor
HUMMEL STEVEN G
US6 patents
⚠️ This page may combine multiple inventors who share the name “HUMMEL STEVEN G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NANOMETRICS INC
2 patentsUS7504642B2Mar 17, 2009
Photoluminescence imaging with preferential detection of photoluminescence signals emitted from a specified material layer of a wafer or other workpiece
NANOMETRICS INC24 citations91
US7446321B2Nov 4, 2008
Differential wavelength photoluminescence for non-contact measuring of contaminants and defects located below the surface of a wafer or other workpiece
NANOMETRICS INC13 citations82