Inventor
MENGEL MARKUS
DE16 patents
⚠️ This page may combine multiple inventors who share the name “MENGEL MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
6 patentsUS7760366B2Jul 20, 2010
System for measuring the image quality of an optical imaging system
ZEISS CARL SMT AG34 citations94
US7286245B2Oct 23, 2007
Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser
ZEISS CARL SMT AG28 citations91
US7796274B2Sep 14, 2010
System for measuring the image quality of an optical imaging system
ZEISS CARL SMT AG21 citations89
US7277182B2Oct 2, 2007
Apparatus for polarization-specific examination, optical imaging system, and calibration method
ZEISS CARL SMT AG15 citations83
US7289223B2Oct 30, 2007
Method and apparatus for spatially resolved polarimetry
ZEISS CARL SMT AG4 citations62
US7456933B2Nov 25, 2008
Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus
ZEISS CARL SMT AG3 citations61
ZEISS CARL SMT GMBH
3 patentsUS7924436B2Apr 12, 2011
Method for approximating an influence of an optical system on the state of polarization of optical radiation
ZEISS CARL SMT GMBH6 citations62
US9429495B2Aug 30, 2016
System for measuring the image quality of an optical imaging system
ZEISS CARL SMT GMBH0 citations50
US8823948B2Sep 2, 2014
System for measuring the image quality of an optical imaging system
ZEISS CARL SMT GMBH0 citations50