Inventor

ITO HIROHITO

JP24 patents

⚠️ This page may combine multiple inventors who share the name “ITO HIROHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ITO HIROHITO

CANON KK

Positioning apparatus and exposure apparatus using the same

Positioning device, exposure device, and device manufacturing method

Stage feeding device

Optical element holding apparatus, exposure apparatus and device manufacturing method

Stage device, method of controlling same, and exposure apparatus using said stage device

Optical element driving apparatus

Optical unit and exposure apparatus having the same

Alignment apparatus

Fluid control mechanism

Optical micromotor, micropump using same and microvalve using same

Reflecting mirror and exposure apparatus using the same

Charged-particle beam exposure apparatus and method of manufacturing article

Scanning apparatus, drawing apparatus, and method of manufacturing article

NGK SPARK PLUG CO

Alumina-based sintered body insulator for spark plugs

Spark plug, insulator for spark plug and process for fabricating the insulator

Spark plug

Spark plug

Method of transfer printing a ceramic spark plug insulator

Transfer sheet, a method of transferring a figuration therefrom and a ceramic product on which the figuration is printed

Method for manufacturing spark plug and caulking metallic mold

ITO HIROHITO

Imprint apparatus and method for producing article

Positioning apparatus, exposure apparatus, and device manufacturing method

Charged-particle beam exposure apparatus and method of manufacturing article

JAPAN AVIATION ELECTRON

Accelerometer