Inventor
TAKAMI SHINICHIRO
JP9 patents
Patents
9 patentsUS6626967B2Sep 30, 2003
Polishing composition and polishing method employing it
FUJIMI INC23 citations91
US9579769B2Feb 28, 2017
Composition for polishing purposes, polishing method using same, and method for producing substrate
FUJIMI INC3 citations72
US7052522B2May 30, 2006
Polishing composition and polishing method using the same
FUJIMI INC9 citations71
US9206336B2Dec 8, 2015
Polishing composition, manufacturing process therefor, process for production of silicon substrate, and silicon substrate
FUJIMI INC2 citations61
US7597729B2Oct 6, 2009
Polishing composition and polishing method using the same
FUJIMI INC2 citations60
US12139643B2Nov 12, 2024
Polishing composition
FUJIMI INC0 citations56
US12110422B2Oct 8, 2024
Polishing method and polishing composition
FUJIMI INC0 citations56
US11897081B2Feb 13, 2024
Method for polishing silicon substrate and polishing composition set
FUJIMI INC0 citations50
US9685343B2Jun 20, 2017
Method for producing polished object and polishing composition kit
FUJIMI INC0 citations38