Inventor
RICHARDSON BRETT C
US20 patents
⚠️ This page may combine multiple inventors who share the name “RICHARDSON BRETT C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
12 patentsUS6350697B1Feb 26, 2002
Method of cleaning and conditioning plasma reaction chamber
LAM RES CORP281 citations98
US5929717AJul 27, 1999
Method of and apparatus for minimizing plasma instability in an RF processor
LAM RES CORP163 citations98
US6815362B1Nov 9, 2004
End point determination of process residues in wafer-less auto clean process using optical emission spectroscopy
LAM RES CORP71 citations97
US10014198B2Jul 3, 2018
Wear detection of consumable part in semiconductor manufacturing equipment
LAM RES CORP27 citations94
US7028696B2Apr 18, 2006
Plasma cleaning of deposition chamber residues using duo-step wafer-less auto clean method
LAM RES CORP26 citations92
US6060837AMay 9, 2000
Method of and apparatus for minimizing plasma instability in an rf processor
LAM RES CORP34 citations92
US5803107ASep 8, 1998
Method and apparatus for pressure control in vacuum processors
LAM RES CORP20 citations91
US5758680AJun 2, 1998
Method and apparatus for pressure control in vacuum processors
LAM RES CORP52 citations91
US5916454AJun 29, 1999
Methods and apparatus for reducing byproduct particle generation in a plasma processing chamber
LAM RES CORP81 citations89
US6921493B2Jul 26, 2005
Method of processing substrates
LAM RES CORP7 citations65
US5961724AOct 5, 1999
Techniques for reducing particulate contamination on a substrate during processing
LAM RES CORP1 citations50
US10854492B2Dec 1, 2020
Edge ring assembly for improving feature profile tilting at extreme edge of wafer
LAM RES CORP0 citations38
RICHARDSON BRETT C
6 patentsUS9743797B2Aug 29, 2017
Portable coffee brewing device
RICHARDSON BRETT C22 citations93
US11246445B2Feb 15, 2022
Portable coffee brewing device
RICHARDSON BRETT C10 citations85
US10219647B2Mar 5, 2019
Portable coffee brewing device
RICHARDSON BRETT C14 citations85
US10231568B2Mar 19, 2019
Portable coffee brewing device
RICHARDSON BRETT C6 citations83
US9743796B2Aug 29, 2017
Portable coffee brewing device
RICHARDSON BRETT C11 citations83
US11849877B2Dec 26, 2023
Portable coffee brewing system
RICHARDSON BRETT C3 citations72