P

Inventor

KOSAKA TAKURO

JP41 patents
⚠️ This page may combine multiple inventors who share the name “KOSAKA TAKURO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINETSU CHEMICAL CO

38 patents
US10078260B2Sep 18, 2018

Phase shift mask blank, phase shift mask, and blank preparing method

SHINETSU CHEMICAL CO7 citations84
US9366951B2Jun 14, 2016

Halftone phase shift photomask blank, halftone phase shift photomask and pattern exposure method

SHINETSU CHEMICAL CO8 citations84
US10678125B2Jun 9, 2020

Photomask blank and method for preparing photomask

SHINETSU CHEMICAL CO5 citations73
US10564537B2Feb 18, 2020

Photomask blank, and preparation method thereof

SHINETSU CHEMICAL CO3 citations73
US10545401B2Jan 28, 2020

Phase shift mask blank, phase shift mask, and blank preparing method

SHINETSU CHEMICAL CO2 citations73
US10466583B2Nov 5, 2019

Halftone phase shift mask blank and halftone phase shift mask

SHINETSU CHEMICAL CO2 citations73
US10146122B2Dec 4, 2018

Halftone phase shift photomask blank and making method

SHINETSU CHEMICAL CO2 citations73
US9927695B2Mar 27, 2018

Halftone phase shift mask blank, halftone phase shift mask, and pattern exposure method

SHINETSU CHEMICAL CO3 citations73
US9778560B2Oct 3, 2017

Method for preparing halftone phase shift photomask blank

SHINETSU CHEMICAL CO2 citations73
US9645485B2May 9, 2017

Halftone phase shift photomask blank and making method

SHINETSU CHEMICAL CO4 citations73
US11061319B2Jul 13, 2021

Photomask blank and making method

SHINETSU CHEMICAL CO2 citations71
US12050396B2Jul 30, 2024

Reflective mask blank, method of manufacturing thereof, and reflective mask

SHINETSU CHEMICAL CO1 citations62
US11644742B2May 9, 2023

Phase shift mask blank, manufacturing method thereof, and phase shift mask

SHINETSU CHEMICAL CO0 citations62
US11333965B2May 17, 2022

Phase shift mask blank, manufacturing method thereof, and phase shift mask

SHINETSU CHEMICAL CO0 citations62
US11327393B2May 10, 2022

Photomask blank and method for preparing photomask

SHINETSU CHEMICAL CO0 citations62
US11307490B2Apr 19, 2022

Phase shift mask blank and phase shift mask

SHINETSU CHEMICAL CO0 citations62
US10989999B2Apr 27, 2021

Halftone phase shift mask blank and halftone phase shift mask

SHINETSU CHEMICAL CO0 citations62
US10372030B2Aug 6, 2019

Halftone phase shift mask blank and halftone phase shift mask

SHINETSU CHEMICAL CO1 citations62
US12197121B2Jan 14, 2025

Phase shift mask blank, manufacturing method of phase shift mask, and phase shift mask

SHINETSU CHEMICAL CO0 citations60
US11422456B2Aug 23, 2022

Phase shift mask blank, method for producing phase shift mask, and phase shift mask

SHINETSU CHEMICAL CO0 citations60
US12353121B2Jul 8, 2025

Reflective mask blank, and reflective mask

SHINETSU CHEMICAL CO0 citations56
US12124162B2Oct 22, 2024

Substrate with film for reflective mask blank, reflective mask blank, and method for manufacturing reflective mask

SHINETSU CHEMICAL CO1 citations56
US12474628B2Nov 18, 2025

Reflective mask blank and method for manufacturing reflective mask

SHINETSU CHEMICAL CO0 citations52
US11860529B2Jan 2, 2024

Substrate with multilayer reflection film for EUV mask blank, manufacturing method thereof, and EUV mask blank

SHINETSU CHEMICAL CO0 citations52
US11835851B2Dec 5, 2023

Substrate with multilayer reflection film for EUV mask blank, manufacturing method thereof, and EUV mask blank

SHINETSU CHEMICAL CO0 citations52
US11789357B2Oct 17, 2023

Method of manufacturing reflective mask blank, and reflective mask blank

SHINETSU CHEMICAL CO0 citations52
US11415874B2Aug 16, 2022

Method of manufacturing reflective mask blank, reflective mask blank, and method of manufacturing reflective mask

SHINETSU CHEMICAL CO0 citations52
US10859904B2Dec 8, 2020

Halftone phase shift photomask blank, making method, and halftone phase shift photomask

SHINETSU CHEMICAL CO0 citations52
US10670957B2Jun 2, 2020

Halftone phase shift photomask blank, making method, and halftone phase shift photomask

SHINETSU CHEMICAL CO0 citations52
US10459333B2Oct 29, 2019

Halftone phase shift photomask blank and making method

SHINETSU CHEMICAL CO0 citations52
US9897911B2Feb 20, 2018

Halftone phase shift photomask blank, making method, and halftone phase shift photomask

SHINETSU CHEMICAL CO0 citations52
US9778559B2Oct 3, 2017

Method for preparing halftone phase shift photomask blank

SHINETSU CHEMICAL CO1 citations52
US9651858B2May 16, 2017

Binary photomask blank, preparation thereof, and preparation of binary photomask

SHINETSU CHEMICAL CO0 citations52
US12265321B2Apr 1, 2025

Reflective mask blank, and method for manufacturing reflective mask

SHINETSU CHEMICAL CO0 citations49
US11073756B2Jul 27, 2021

Photomask blank, photomask blank making method, and photomask making method

SHINETSU CHEMICAL CO0 citations46
US10782609B2Sep 22, 2020

Photomask blank and photomask

SHINETSU CHEMICAL CO0 citations45
US10656516B2May 19, 2020

Photomask blank, and preparation method thereof

SHINETSU CHEMICAL CO0 citations42
US11644743B2May 9, 2023

Halftone phase shift-type photomask blank, method of manufacturing thereof, and halftone phase shift-type photomask

SHINETSU CHEMICAL CO0 citations41

SONY SEMICONDUCTOR SOLUTIONS CORP

3 patents