Inventor
CHIU HUA-SHENG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “CHIU HUA-SHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS10533852B1Jan 14, 2020
Leveling sensor, load port including the same, and method of leveling a load port
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11827970B2Nov 28, 2023
Shutter disc for a semiconductor processing tool
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations67
US11022437B2Jun 1, 2021
Leveling sensor, load port including the same, and method of leveling a load port
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US12215414B2Feb 4, 2025
Shutter disc for a semiconductor processing tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58