Inventor
IWAO MICHINORI
JP12 patents
Patents
12 patentsUS10861717B2Dec 8, 2020
Substrate processing apparatus, processing liquid draining method, processing liquid replacing method, and substrate processing method
SCREEN HOLDINGS CO LTD2 citations71
US11043398B2Jun 22, 2021
Substrate processing device
SCREEN HOLDINGS CO LTD4 citations70
US10727090B2Jul 28, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD3 citations70
US10249517B2Apr 2, 2019
Substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations61
US11935763B2Mar 19, 2024
Substrate processing device
SCREEN HOLDINGS CO LTD0 citations60
US10933448B2Mar 2, 2021
Substrate treatment apparatus and substrate treatment method
SCREEN HOLDINGS CO LTD1 citations59
US11823921B2Nov 21, 2023
Substrate processing device and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US11211264B2Dec 28, 2021
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
US10882080B2Jan 5, 2021
Substrate processing apparatus and method of processing substrate
SCREEN HOLDINGS CO LTD0 citations49
US10553422B2Feb 4, 2020
Substrate treatment method of treating substrate, and substrate treatment apparatus
SCREEN HOLDINGS CO LTD0 citations41
US10446388B2Oct 15, 2019
Substrate processing device
SCREEN HOLDINGS CO LTD0 citations39
US10741422B2Aug 11, 2020
Substrate processing device and substrate processing method
SCREEN HOLDINGS CO LTD0 citations36