Inventor

ROTTER LAWRENCE D

US11 patents

⚠️ This page may combine multiple inventors who share the name “ROTTER LAWRENCE D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

5 patents

US9400246B2Jul 26, 2016

Optical metrology tool equipped with modulated illumination sources

KLA TENCOR CORP5 citations83

US10203247B2Feb 12, 2019

Systems for providing illumination in optical metrology

KLA TENCOR CORP10 citations81

US10969328B2Apr 6, 2021

Optical metrology tool equipped with modulated illumination sources

KLA TENCOR CORP0 citations61

US9512985B2Dec 6, 2016

Systems for providing illumination in optical metrology

KLA TENCOR CORP2 citations60

US10215688B2Feb 26, 2019

Optical metrology tool equipped with modulated illumination sources

KLA TENCOR CORP0 citations51

ROTTER LAWRENCE D

2 patents

US8643841B1Feb 4, 2014

Angle-resolved spectroscopic instrument

ROTTER LAWRENCE D4 citations69

US8111399B2Feb 7, 2012

System and method for performing photothermal measurements and relaxation compensation

ROTTER LAWRENCE D1 citations43

HILL ANDREW V

1 patent

US8896832B2Nov 25, 2014

Discrete polarization scatterometry

HILL ANDREW V25 citations90

THERMA WAVE INC

1 patent

US6784991B2Aug 31, 2004

Diffractive optical elements and grid polarizers in focusing spectroscopic ellipsometers

THERMA WAVE INC8 citations73

KLA CORP

1 patent

US11913874B2Feb 27, 2024

Optical metrology tool equipped with modulated illumination sources

KLA CORP0 citations61

ZHUANG GUORONG V

1 patent

US9146156B2Sep 29, 2015

Light source tracking in optical metrology system

ZHUANG GUORONG V3 citations56