Inventor
PETERLINZ KEVIN
US14 patents
⚠️ This page may combine multiple inventors who share the name “PETERLINZ KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
11 patentsUS9778213B2Oct 3, 2017
Metrology tool with combined XRF and SAXS capabilities
KLA TENCOR CORP39 citations93
US9243886B1Jan 26, 2016
Optical metrology of periodic targets in presence of multiple diffraction orders
KLA TENCOR CORP34 citations93
US9228943B2Jan 5, 2016
Dynamically adjustable semiconductor metrology system
KLA TENCOR CORP31 citations93
US9816810B2Nov 14, 2017
Measurement of multiple patterning parameters
KLA TENCOR CORP11 citations84
US9490182B2Nov 8, 2016
Measurement of multiple patterning parameters
KLA TENCOR CORP12 citations84
US9400246B2Jul 26, 2016
Optical metrology tool equipped with modulated illumination sources
KLA TENCOR CORP5 citations83
US10612916B2Apr 7, 2020
Measurement of multiple patterning parameters
KLA TENCOR CORP4 citations73
US9574992B1Feb 21, 2017
Single wavelength ellipsometry with improved spot size capability
KLA TENCOR CORP5 citations68
US8982358B2Mar 17, 2015
Apparatus and method of measuring roughness and other parameters of a structure
KLA TENCOR CORP2 citations62
US10969328B2Apr 6, 2021
Optical metrology tool equipped with modulated illumination sources
KLA TENCOR CORP0 citations61
US10215688B2Feb 26, 2019
Optical metrology tool equipped with modulated illumination sources
KLA TENCOR CORP0 citations51