Inventor
SHAUGHNESSY DERRICK A
US8 patents
⚠️ This page may combine multiple inventors who share the name “SHAUGHNESSY DERRICK A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
5 patentsUS11913874B2Feb 27, 2024
Optical metrology tool equipped with modulated illumination sources
KLA CORP0 citations61
US12510590B2Dec 30, 2025
Metrology in the presence of CMOS under array (CuA) structures utilizing an effective medium model with physical modeling
KLA CORP0 citations48
US12380367B2Aug 5, 2025
Metrology in the presence of CMOS under array (CuA) structures utilizing machine learning and physical modeling
KLA CORP0 citations48
US12372882B2Jul 29, 2025
Metrology in the presence of CMOS under array (CUA) structures utilizing an effective medium model with classification of CUA structures
KLA CORP0 citations48
US12571724B2Mar 10, 2026
Single wafer orientation tool-induced shift cleaning
KLA CORP0 citations43
KLA TENCOR CORP
3 patentsUS10203247B2Feb 12, 2019
Systems for providing illumination in optical metrology
KLA TENCOR CORP10 citations81
US10969328B2Apr 6, 2021
Optical metrology tool equipped with modulated illumination sources
KLA TENCOR CORP0 citations61
US10215688B2Feb 26, 2019
Optical metrology tool equipped with modulated illumination sources
KLA TENCOR CORP0 citations51