Inventor
SMAKMAN ERWIN PAUL
NL13 patents
Patents
13 patentsUS10712669B2Jul 14, 2020
Method and apparatus for direct write maskless lithography
ASML NETHERLANDS BV4 citations71
US10527950B2Jan 7, 2020
Apparatus for direct write maskless lithography
ASML NETHERLANDS BV3 citations71
US10928736B2Feb 23, 2021
Method and apparatus for direct write maskless lithography
ASML NETHERLANDS BV2 citations68
US12500063B2Dec 16, 2025
Method and apparatus for inspection
ASML NETHERLANDS BV0 citations61
US11875966B2Jan 16, 2024
Method and apparatus for inspection
ASML NETHERLANDS BV0 citations61
US11094502B2Aug 17, 2021
Method and apparatus for inspection
ASML NETHERLANDS BV0 citations61
US12165836B2Dec 10, 2024
Systems and methods of profiling charged-particle beams
ASML NETHERLANDS BV0 citations60
US11942302B2Mar 26, 2024
Pulsed charged-particle beam system
ASML NETHERLANDS BV0 citations59
US11881374B2Jan 23, 2024
Apparatus for and method of controlling an energy spread of a charged-particle beam
ASML NETHERLANDS BV0 citations59
US11243179B2Feb 8, 2022
Inspection tool, lithographic apparatus, electron beam source and an inspection method
ASML NETHERLANDS BV0 citations58
US12313980B2May 27, 2025
Inspection system, lithographic apparatus, and inspection method
ASML NETHERLANDS BV0 citations50
US11747738B2Sep 5, 2023
Determining the combination of patterns to be applied to a substrate in a lithography step
ASML NETHERLANDS BV0 citations50
US11791132B2Oct 17, 2023
Aperture array with integrated current measurement
ASML NETHERLANDS BV0 citations49