Inventor
MANGNUS ALBERTUS VICTOR GERARDUS
NL16 patents
Patents
16 patentsUS11821859B2Nov 21, 2023
Charged particle optical device, objective lens assembly, detector, detector array, and methods
ASML NETHERLANDS BV3 citations72
US12422387B2Sep 23, 2025
Charged particle optical device, objective lens assembly, detector, detector array, and methods
ASML NETHERLANDS BV0 citations62
US11442368B2Sep 13, 2022
Inspection tool, inspection method and computer program product
ASML NETHERLANDS BV1 citations62
US12230469B2Feb 18, 2025
Apparatus for and method of local control of a charged particle beam
ASML NETHERLANDS BV0 citations60
US12125671B2Oct 22, 2024
Multi-source charged particle illumination apparatus
ASML NETHERLANDS BV1 citations59
US11942302B2Mar 26, 2024
Pulsed charged-particle beam system
ASML NETHERLANDS BV0 citations59
US11881374B2Jan 23, 2024
Apparatus for and method of controlling an energy spread of a charged-particle beam
ASML NETHERLANDS BV0 citations59
US12546731B1Feb 10, 2026
Inspection tool, inspection tool operating method, and non-transitory computer readable medium
ASML NETHERLANDS BV0 citations58
US11243179B2Feb 8, 2022
Inspection tool, lithographic apparatus, electron beam source and an inspection method
ASML NETHERLANDS BV0 citations58
US11961700B2Apr 16, 2024
Systems and methods for image enhancement for a multi-beam charged-particle inspection system
ASML NETHERLANDS BV0 citations57
US12562334B2Feb 24, 2026
Multi-beam charged particle column
ASML NETHERLANDS BV0 citations55
US12325911B2Jun 10, 2025
Method and apparatus for forming a patterned layer of material
ASML NETHERLANDS BV0 citations54
US11942303B2Mar 26, 2024
Systems and methods for real time stereo imaging using multiple electron beams
ASML NETHERLANDS BV0 citations51
US12394589B2Aug 19, 2025
Charged particle device, detector, and methods
ASML NETHERLANDS BV0 citations50
US12313980B2May 27, 2025
Inspection system, lithographic apparatus, and inspection method
ASML NETHERLANDS BV0 citations50
US11791132B2Oct 17, 2023
Aperture array with integrated current measurement
ASML NETHERLANDS BV0 citations49