Inventor
HOEGELE WOLFGANG
DE12 patents
⚠️ This page may combine multiple inventors who share the name “HOEGELE WOLFGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
6 patentsUS9500954B2Nov 22, 2016
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH3 citations71
US9910359B2Mar 6, 2018
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations50
US9310690B2Apr 12, 2016
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations50
US11728130B2Aug 15, 2023
Method of recording an image using a particle microscope
ZEISS CARL SMT GMBH0 citations48
US10394128B2Aug 27, 2019
Method for predicting at least one illumination parameter for evaluating an illumination setting
ZEISS CARL SMT GMBH0 citations48
US10078267B2Sep 18, 2018
Method for predicting at least one illumination parameter for evaluating an illumination setting
ZEISS CARL SMT GMBH1 citations48
ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH
6 patentsUS11948293B2Apr 2, 2024
Method and arrangement for determining a position of an object
ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH0 citations49
US11841433B2Dec 12, 2023
Method and apparatus for determining at least one spatial position and orientation of at least one tracked measuring device
ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH0 citations47
US11675080B2Jun 13, 2023
Method and apparatus for determining at least one spatial position and orientation of at least one object
ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH0 citations47
US11187522B2Nov 30, 2021
Measuring apparatus and method for positioning and aligning retroreflectors in a distribution of retroreflectors of a measuring apparatus
ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH0 citations47
US10852126B2Dec 1, 2020
Method and arrangement for optically capturing an object with a light pattern projection
ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH0 citations36
US10605592B2Mar 31, 2020
Method and arrangement for capturing coordinates of an object surface by triangulation
ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH0 citations30