Inventor

NIMMALA SREEHARI

US2 patents

Patents

2 patents

US7186653B2Mar 6, 2007

Polishing slurries and methods for chemical mechanical polishing

CLIMAX ENGINEERED MAT LLC7 citations68

US7553430B2Jun 30, 2009

Polishing slurries and methods for chemical mechanical polishing

CLIMAX ENGINEERED MAT LLC1 citations42