Inventor

HEGDE SHARATH

US2 patents

⚠️ This page may combine multiple inventors who share the name “HEGDE SHARATH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CLIMAX ENGINEERED MAT LLC

1 patent

US7186653B2Mar 6, 2007

Polishing slurries and methods for chemical mechanical polishing

CLIMAX ENGINEERED MAT LLC7 citations68

UNIV CLARKSON

1 patent

US7723234B2May 25, 2010

Method for selective CMP of polysilicon

UNIV CLARKSON6 citations57