Inventor

CASTELLANOS ORTEGA SONIA

NL3 patents

⚠️ This page may combine multiple inventors who share the name “CASTELLANOS ORTEGA SONIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US12399428B2Aug 26, 2025

Method and apparatus for forming a patterned layer of material

ASML NETHERLANDS BV0 citations57

US11807937B2Nov 7, 2023

Method and apparatus for forming a patterned layer of carbon, method of forming a patterned layer of material

ASML NETHERLANDS BV0 citations42

INPRIA CORP

1 patent

US11947262B2Apr 2, 2024

Process environment for inorganic resist patterning

INPRIA CORP0 citations58