Inventor

LUGIER OLIVIER CHRISTIAN MAURICE

NL2 patents

Patents

2 patents

US12399428B2Aug 26, 2025

Method and apparatus for forming a patterned layer of material

ASML NETHERLANDS BV0 citations57

US11807937B2Nov 7, 2023

Method and apparatus for forming a patterned layer of carbon, method of forming a patterned layer of material

ASML NETHERLANDS BV0 citations42