Inventor
NORO MAKOTO
JP6 patents
Patents
6 patentsUS6590710B2Jul 8, 2003
Fabry-Perot filter, wavelength-selective infrared detector and infrared gas analyzer using the filter and detector
YOKOGAWA ELECTRIC CORP116 citations93
US11592347B2Feb 28, 2023
Resonant pressure sensor with imporved linearity
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US11815420B2Nov 14, 2023
Resonant pressure sensor with improved linearity
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US11428594B2Aug 30, 2022
Resonant pressure sensor with improved linearity
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US11211916B2Dec 28, 2021
Resonant transducer
YOKOGAWA ELECTRIC CORP0 citations48
US10955434B2Mar 23, 2021
Resonant sensor device
YOKOGAWA ELECTRIC CORP0 citations47