Inventor
KOLLBERG MARCEL
DE6 patents
Patents
6 patentsUS11702740B2Jul 18, 2023
Closure element for closing a loading opening of an inner housing of a CVD reactor
AIXTRON SE4 citations68
US12098462B2Sep 24, 2024
Method for producing a component part of a CVD reactor
AIXTRON SE0 citations47
US11053586B2Jul 6, 2021
Coated flat component in a CVD reactor
AIXTRON SE0 citations46
US11286566B2Mar 29, 2022
Apparatus for deposition of a III-V semiconductor layer
AIXTRON SE0 citations45
US10883171B2Jan 5, 2021
CVD reactor and method for cleaning a CVD reactor
AIXTRON SE0 citations44
US12110591B2Oct 8, 2024
Susceptor arrangement of a CVD reactor
AIXTRON SE0 citations41