Inventor
KIM WONLAE
KR6 patents
Patents
6 patentsUS12272560B2Apr 8, 2025
Selective removal of metal oxide hard masks
ENTEGRIS INC0 citations54
US12152187B2Nov 26, 2024
Nitride etchant composition and method
ENTEGRIS INC0 citations54
US10790187B2Sep 29, 2020
Post-etch residue removal for advanced node beol processing
ENTEGRIS INC0 citations48
US10577567B2Mar 3, 2020
Cleaning compositions for removing post etch residue
ENTEGRIS INC0 citations48
US11492709B2Nov 8, 2022
Method and composition for etching molybdenum
ENTEGRIS INC0 citations45
US10347504B2Jul 9, 2019
Use of non-oxidizing strong acids for the removal of ion-implanted resist
ENTEGRIS INC0 citations39