Inventor
BERGER LARS
DE11 patents
⚠️ This page may combine multiple inventors who share the name “BERGER LARS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
6 patentsUS10983443B2Apr 20, 2021
Control device for actuating an actuator unit of a lithography system, lithography system having a control device, and method for operating the control device
ZEISS CARL SMT GMBH4 citations63
US12276916B2Apr 15, 2025
Drive device, optical system and lithography apparatus
ZEISS CARL SMT GMBH0 citations48
US9851554B2Dec 26, 2017
Method for displacing at least one optical component
ZEISS CARL SMT GMBH0 citations48
US10444633B2Oct 15, 2019
Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system
ZEISS CARL SMT GMBH0 citations39
US10437155B2Oct 8, 2019
Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system
ZEISS CARL SMT GMBH0 citations39
US10866528B2Dec 15, 2020
Component for a projection exposure apparatus
ZEISS CARL SMT GMBH0 citations32