Inventor

KEMP KEVIN G

US6 patents

⚠️ This page may combine multiple inventors who share the name “KEMP KEVIN G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MOTOROLA INC

3 patents

US5308741AMay 3, 1994

Lithographic method using double exposure techniques, mask position shifting and light phase shifting

MOTOROLA INC233 citations97

US5525542AJun 11, 1996

Method for making a semiconductor device having anti-reflective coating

MOTOROLA INC65 citations95

US5292623AMar 8, 1994

Method for forming integrated circuit devices using a phase shifting mask

MOTOROLA INC21 citations92

FSI INT INC

3 patents

US6072163AJun 6, 2000

Combination bake/chill apparatus incorporating low thermal mass, thermally conductive bakeplate

FSI INT INC692 citations94

US6599560B1Jul 29, 2003

Liquid coating device with barometric pressure compensation

FSI INT INC22 citations88

US7238239B2Jul 3, 2007

Liquid coating device with barometric pressure compensation

FSI INT INC1 citations48