Inventor
WARLAUMONT JOHN M
US4 patents
Patents
4 patentsUS4551192ANov 5, 1985
Electrostatic or vacuum pinchuck formed with microcircuit lithography
IBM434 citations96
US4436797AMar 13, 1984
X-Ray mask
IBM40 citations92
US4405238ASep 20, 1983
Alignment method and apparatus for x-ray or optical lithography
IBM36 citations89
US5155749AOct 13, 1992
Variable magnification mask for X-ray lithography
IBM26 citations87