P

Inventor

MORI TAKASHI

JP257 patents
⚠️ This page may combine multiple inventors who share the name “MORI TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

18 patents
US6268904B1Jul 31, 2001

Optical exposure apparatus and photo-cleaning method

NIKON CORP146 citations98
US5581605ADec 3, 1996

Optical element, production method of optical element, optical system, and optical apparatus

NIKON CORP148 citations98
US5245384ASep 14, 1993

Illuminating optical apparatus and exposure apparatus having the same

NIKON CORP123 citations98
US6727980B2Apr 27, 2004

Apparatus and method for pattern exposure and method for adjusting the apparatus

NIKON CORP55 citations96
US6661499B2Dec 9, 2003

Projection exposure apparatus with a catadioptric projection optical system

NIKON CORP64 citations96
US6466303B1Oct 15, 2002

Projection exposure apparatus with a catadioptric projection optical system

NIKON CORP76 citations96
US5636003AJun 3, 1997

Illumination optical apparatus and scanning exposure apparatus

NIKON CORP56 citations96
US5594526AJan 14, 1997

Optical integrator and projection exposure apparatus using the same

NIKON CORP93 citations96
US5906429AMay 25, 1999

Optical illumination device

NIKON CORP66 citations95
US5669708ASep 23, 1997

Optical element, production method of optical element, optical system, and optical apparatus

NIKON CORP90 citations95
US5760963AJun 2, 1998

Fly-eye lens, illumination optical apparatus, and exposure apparatus

NIKON CORP40 citations93
US5296892AMar 22, 1994

Illuminating apparatus and projection exposure apparatus provided with such an illuminating apparatus

NIKON CORP43 citations93
US6642994B2Nov 4, 2003

Optical exposure apparatus and photo-cleaning method

NIKON CORP19 citations92
US6108126AAug 22, 2000

Illuminating apparatus

NIKON CORP25 citations92
US5640284AJun 17, 1997

Optical reflector, illumination optical system, light source system and illumination optical apparatus

NIKON CORP40 citations92
US5615047AMar 25, 1997

Illumination apparatus and exposure apparatus using it

NIKON CORP28 citations92
US5891806AApr 6, 1999

Proximity-type microlithography apparatus and method

NIKON CORP40 citations91
US5207505AMay 4, 1993

Illumination light source device

NIKON CORP39 citations91

HITACHI LTD

11 patents

ZANAVY INFORMATICS KK

5 patents

TOSOH CORP

3 patents

CANON KK

2 patents

RICOH KK

2 patents

ANRITSU CORP

2 patents

SANYO ELECTRIC BIOMED CO LTD

1 patent

HITACHI KOKI KK

1 patent

NIPPON KOGAKU KK

1 patent

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent

TOYO SODA MFG CO LTD

1 patent

FUJITSU LTD

1 patent

TOSHIBA KK

1 patent

Showing the top 50 of 257 patents by PatentIndex Score.