Inventor
ZAHORIK RUSSELL C
US43 patents
⚠️ This page may combine multiple inventors who share the name “ZAHORIK RUSSELL C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
40 patentsUS6337266B1Jan 8, 2002
Small electrode for chalcogenide memories
MICRON TECHNOLOGY INC150 citations99
US6316784B1Nov 13, 2001
Method of making chalcogenide memory device
MICRON TECHNOLOGY INC239 citations99
US6236059B1May 22, 2001
Memory cell incorporating a chalcogenide element and method of making same
MICRON TECHNOLOGY INC727 citations99
US6189582B1Feb 20, 2001
Small electrode for a chalcogenide switching device and method for fabricating same
MICRON TECHNOLOGY INC445 citations99
US6153890ANov 28, 2000
Memory cell incorporating a chalcogenide element
MICRON TECHNOLOGY INC370 citations99
US5998244ADec 7, 1999
Memory cell incorporating a chalcogenide element and method of making same
MICRON TECHNOLOGY INC462 citations99
US5970336AOct 19, 1999
Method of making memory cell incorporating a chalcogenide element
MICRON TECHNOLOGY INC439 citations99
US5952671ASep 14, 1999
Small electrode for a chalcogenide switching device and method for fabricating same
MICRON TECHNOLOGY INC431 citations99
US5789277AAug 4, 1998
Method of making chalogenide memory device
MICRON TECHNOLOGY INC694 citations99
US6103636AAug 15, 2000
Method and apparatus for selective removal of material from wafer alignment marks
MICRON TECHNOLOGY INC122 citations98
US6057602AMay 2, 2000
Low friction polish-stop stratum for endpointing chemical-mechanical planarization processing of semiconductor wafers
MICRON TECHNOLOGY INC98 citations98
US6797612B2Sep 28, 2004
Method of fabricating a small electrode for chalcogenide memory cells
MICRON TECHNOLOGY INC31 citations96
US6777705B2Aug 17, 2004
X-point memory cell
MICRON TECHNOLOGY INC33 citations96
US6635951B1Oct 21, 2003
Small electrode for chalcogenide memories
MICRON TECHNOLOGY INC45 citations96
US6329301B1Dec 11, 2001
Method and apparatus for selective removal of material from wafer alignment marks
MICRON TECHNOLOGY INC25 citations96
US6057231AMay 2, 2000
Method for improved metal fill by treatment of mobility layers
MICRON TECHNOLOGY INC40 citations96
US6015977AJan 18, 2000
Integrated circuit memory cell having a small active area and method of forming same
MICRON TECHNOLOGY INC40 citations96
US5798302AAug 25, 1998
Low friction polish-stop stratum for endpointing chemical-mechanical planarization processing of semiconductor wafers
MICRON TECHNOLOGY INC75 citations96
US6812139B2Nov 2, 2004
Method for metal fill by treatment of mobility layers
MICRON TECHNOLOGY INC17 citations93
US6534368B2Mar 18, 2003
Integrated circuit memory cell having a small active area and method of forming same
MICRON TECHNOLOGY INC16 citations93
US6531391B2Mar 11, 2003
Method of fabricating a conductive path in a semiconductor device
MICRON TECHNOLOGY INC22 citations93
US6492656B2Dec 10, 2002
Reduced mask chalcogenide memory
MICRON TECHNOLOGY INC14 citations93
US6482735B1Nov 19, 2002
Method for improved metal fill by treatment of mobility layers
MICRON TECHNOLOGY INC23 citations93
US6287919B1Sep 11, 2001
Integrated circuit memory cell having a small active area and method of forming same
MICRON TECHNOLOGY INC21 citations93
US6054768AApr 25, 2000
Metal fill by treatment of mobility layers
MICRON TECHNOLOGY INC24 citations93
US6610610B2Aug 26, 2003
Methods for selective removal of material from wafer alignment marks
MICRON TECHNOLOGY INC13 citations92
US6040613AMar 21, 2000
Antireflective coating and wiring line stack
MICRON TECHNOLOGY INC21 citations92
US5783804AJul 21, 1998
Reflectance method for accurate process calibration in semiconductor substrate heat treatment
MICRON TECHNOLOGY INC20 citations92
US5618461AApr 8, 1997
Reflectance method for accurate process calibration in semiconductor wafer heat treatment
MICRON TECHNOLOGY INC18 citations92
US6447634B1Sep 10, 2002
Method and apparatus for selective removal of material from wafer alignment marks
MICRON TECHNOLOGY INC23 citations90
US7687881B2Mar 30, 2010
Small electrode for phase change memories
MICRON TECHNOLOGY INC4 citations74
US7494922B2Feb 24, 2009
Small electrode for phase change memories
MICRON TECHNOLOGY INC5 citations74
US7273809B2Sep 25, 2007
Method of fabricating a conductive path in a semiconductor device
MICRON TECHNOLOGY INC6 citations74
US6984874B2Jan 10, 2006
Semiconductor device with metal fill by treatment of mobility layers including forming a refractory metal nitride using TMEDT
MICRON TECHNOLOGY INC6 citations74
US6690077B1Feb 10, 2004
Antireflective coating and field emission display device, semiconductor device and wiring line comprising same
MICRON TECHNOLOGY INC6 citations74
US6194308B1Feb 27, 2001
Method of forming wire line
MICRON TECHNOLOGY INC9 citations74
US6889698B2May 10, 2005
Apparatus for selective removal of material from wafer alignment marks
MICRON TECHNOLOGY INC3 citations73
US6530113B2Mar 11, 2003
Apparatus for selective removal of material from wafer alignment marks
MICRON TECHNOLOGY INC8 citations73
US5200359AApr 6, 1993
Method of decreasing contact resistance between a lower elevation aluminum layer and a higher elevation electrically conductive layer
MICRON TECHNOLOGY INC14 citations65
US8053371B2Nov 8, 2011
Apparatus and methods for selective removal of material from wafer alignment marks
MICRON TECHNOLOGY INC0 citations52