Inventor
ISHIMOTO TOMOKO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “ISHIMOTO TOMOKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS6054181AApr 25, 2000
Method of substrate processing to form a film on multiple target objects
TOKYO ELECTRON LTD106 citations98
US5565034AOct 15, 1996
Apparatus for processing substrates having a film formed on a surface of the substrate
TOKYO ELECTRON LTD216 citations98
US5725664AMar 10, 1998
Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections
TOKYO ELECTRON LTD87 citations95