Inventor
ABE MASAHITO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “ABE MASAHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
10 patentsUS6488774B1Dec 3, 2002
Trap apparatus
EBARA CORP378 citations99
US6282368B1Aug 28, 2001
Liquid feed vaporization system and gas injection device
EBARA CORP104 citations99
US6132512AOct 17, 2000
Vapor-phase film growth apparatus and gas ejection head
EBARA CORP225 citations99
US5951923ASep 14, 1999
Vaporizer apparatus and film deposition apparatus therewith
EBARA CORP275 citations99
US6387182B1May 14, 2002
Apparatus and method for processing substrate
EBARA CORP113 citations97
US6195504B1Feb 27, 2001
Liquid feed vaporization system and gas injection device
EBARA CORP58 citations96
US6269221B1Jul 31, 2001
Liquid feed vaporization system and gas injection device
EBARA CORP16 citations92
US5950646ASep 14, 1999
Vapor feed supply system
EBARA CORP23 citations92
US6312569B1Nov 6, 2001
Chemical vapor deposition apparatus and cleaning method thereof
EBARA CORP11 citations73
US12101073B2Sep 24, 2024
Method for determining a cleanliness of a cleaning member
EBARA CORP0 citations44