Inventor
YEDNAK III ANDREW
US5 patents
Patents
5 patentsUS6685537B1Feb 3, 2004
Polishing pad window for a chemical mechanical polishing tool
SPEEDFAM IPEC CORP56 citations94
US6217410B1Apr 17, 2001
Apparatus for cleaning workpiece surfaces and monitoring probes during workpiece processing
SPEEDFAM IPEC CORP19 citations90
US5958148ASep 28, 1999
Method for cleaning workpiece surfaces and monitoring probes during workpiece processing
SPEEDFAM IPEC CORP42 citations90
US6402602B1Jun 11, 2002
Rotary union for semiconductor wafer applications
SPEEDFAM IPEC CORP7 citations72
US6406362B1Jun 18, 2002
Seal for use with a chemical mechanical planarization apparatus
SPEEDFAM IPEC CORP3 citations58