P

Inventor

NATALICIO JOHN

US9 patents
⚠️ This page may combine multiple inventors who share the name “NATALICIO JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM IPEC CORP

7 patents
US6354927B1Mar 12, 2002

Micro-adjustable wafer retaining apparatus

SPEEDFAM IPEC CORP53 citations95
US6113468ASep 5, 2000

Wafer planarization carrier having floating pad load ring

SPEEDFAM IPEC CORP75 citations95
US5989104ANov 23, 1999

Workpiece carrier with monopiece pressure plate and low gimbal point

SPEEDFAM IPEC CORP54 citations94
US6213855B1Apr 10, 2001

Self-powered carrier for polishing or planarizing wafers

SPEEDFAM IPEC CORP32 citations92
US6217410B1Apr 17, 2001

Apparatus for cleaning workpiece surfaces and monitoring probes during workpiece processing

SPEEDFAM IPEC CORP19 citations90
US5958148ASep 28, 1999

Method for cleaning workpiece surfaces and monitoring probes during workpiece processing

SPEEDFAM IPEC CORP42 citations90
US6283836B1Sep 4, 2001

Non-abrasive conditioning for polishing pads

SPEEDFAM IPEC CORP7 citations72

SPEEDFAM CORP

2 patents
US5916015AJun 29, 1999

Wafer carrier for semiconductor wafer polishing machine

SPEEDFAM CORP107 citations97
US5899216AMay 4, 1999

Apparatus for rinsing wafers in the context of a combined cleaning rinsing and drying system

SPEEDFAM CORP31 citations90