Inventor

GARDINER ROBIN A

DE17 patents

⚠️ This page may combine multiple inventors who share the name “GARDINER ROBIN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GARDINER ROBIN A

ADVANCED TECH MATERIALS

Growth of BaSrTiO3 using polyamine-based precursors

Metal complex source reagents for MOCVD

Method of forming a superconducting oxide layer by MOCVD

Source reagent compounds for MOCVD of refractory films containing group IIA elements

Method of forming metal films on a substrate by chemical vapor deposition

Metal complex source reagents for chemical vapor deposition

Precursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising same

Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same

Etching method for refractory materials

Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem

Method for delivering an involatile reagent in vapor form to a CVD reactor

Apparatus for flash vaporization delivery of reagents

Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition

Metal complex source reagents for chemical vapor deposition

Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids

Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids

GARDINER ROBIN A

Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition