Inventor

KIRLIN PETER S

US36 patents

⚠️ This page may combine multiple inventors who share the name “KIRLIN PETER S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIRLIN PETER S

ADVANCED TECH MATERIALS

Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same

Growth of BaSrTiO3 using polyamine-based precursors

Metal complex source reagents for MOCVD

Method of forming a superconducting oxide layer by MOCVD

Source reagent compounds for MOCVD of refractory films containing group IIA elements

Method of forming metal films on a substrate by chemical vapor deposition

Metal complex source reagents for chemical vapor deposition

Precursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising same

Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same

Etching method for refractory materials

Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem

Method for delivering an involatile reagent in vapor form to a CVD reactor

Chemical mechanical polishing of FeRAM capacitors

Apparatus for flash vaporization delivery of reagents

Diffusion barriers between noble metal electrodes and metallization layers, and integrated circuit and semiconductor devices comprising same

Smart card comprising integrated circuitry including EPROM and error check and correction system

Ferroelectric capacitor and integrated circuit device comprising same

Sorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge members

Tantalum and niobium reagents useful in chemical vapor deposition processes, and process for depositing coatings using the same

Chemical vapor deposition of tantalum- or niobium-containing coatings

Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition

Platinum source compositions for chemical vapor deposition of platinum

Metal complex source reagents for chemical vapor deposition

Bulk storage and dispensing system for fluids

Platinum source compositions for chemical vapor deposition of platinum

Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery

Method of fabricating a ferrolelectric capacitor with a graded barrier layer structure

Isotropic dry cleaning process for noble metal integrated circuit structures

Plasma-assisted dry etching of noble metal-based materials

Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids

Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids

High temperature superconductor/diamond composite article, and method of making the same

TEXAS INSTRUMENTS INC

High-dielectric-constant material electrodes comprising thin platinum layers

High-dielectric-constant material electrodes comprising thin platinum layers

High-dielectric-constant material electrodes comprising thin platinum layers

GARDINER ROBIN A

Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition