Inventor
MELCHIOR JOHN T
US12 patents
Patents
12 patentsUS6018537AJan 25, 2000
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC280 citations98
US6330261B1Dec 11, 2001
Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
CYMER INC105 citations97
US6904073B2Jun 7, 2005
High power deep ultraviolet laser with long life optics
CYMER INC78 citations95
US6750972B2Jun 15, 2004
Gas discharge ultraviolet wavemeter with enhanced illumination
CYMER INC55 citations94
US6795474B2Sep 21, 2004
Gas discharge laser with improved beam path
CYMER INC46 citations92
USRE38054EApr 1, 2003
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC42 citations92
US6539046B2Mar 25, 2003
Wavemeter for gas discharge laser
CYMER INC30 citations92
US6912052B2Jun 28, 2005
Gas discharge MOPA laser spectral analysis module
CYMER INC22 citations91
US6894785B2May 17, 2005
Gas discharge MOPA laser spectral analysis module
CYMER INC11 citations72
US6839372B2Jan 4, 2005
Gas discharge ultraviolet laser with enclosed beam path with added oxidizer
CYMER INC8 citations68
US7292343B2Nov 6, 2007
Gas discharge MOPA laser spectral analysis module
CYMER INC4 citations61
USRE41457EJul 27, 2010
Wavemeter for gas discharge laser
CYMER INC0 citations41