Inventor
GANTVARG EUGENE
US29 patents
⚠️ This page may combine multiple inventors who share the name “GANTVARG EUGENE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
28 patentsUS6146463ANov 14, 2000
Apparatus and method for aligning a substrate on a support member
APPLIED MATERIALS INC412 citations99
US5964653AOct 12, 1999
Carrier head with a flexible membrane for a chemical mechanical polishing system
APPLIED MATERIALS INC194 citations99
US5804507ASep 8, 1998
Radially oscillating carousel processing system for chemical mechanical polishing
APPLIED MATERIALS INC243 citations99
US5738574AApr 14, 1998
Continuous processing system for chemical mechanical polishing
APPLIED MATERIALS INC797 citations99
US5951770ASep 14, 1999
Carousel wafer transfer system
APPLIED MATERIALS INC138 citations98
US6082951AJul 4, 2000
Wafer cassette load station
APPLIED MATERIALS INC104 citations97
US7614939B2Nov 10, 2009
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
APPLIED MATERIALS INC39 citations96
US6896584B2May 24, 2005
Method of controlling carrier head with multiple chambers
APPLIED MATERIALS INC29 citations96
US6468353B1Oct 22, 2002
Method and apparatus for improved substrate handling
APPLIED MATERIALS INC78 citations96
US6287386B1Sep 11, 2001
Carousel wafer transfer system
APPLIED MATERIALS INC77 citations96
US6126517AOct 3, 2000
System for chemical mechanical polishing having multiple polishing stations
APPLIED MATERIALS INC63 citations96
US6086457AJul 11, 2000
Washing transfer station in a system for chemical mechanical polishing
APPLIED MATERIALS INC71 citations96
US6080046AJun 27, 2000
Underwater wafer storage and wafer picking for chemical mechanical polishing
APPLIED MATERIALS INC49 citations96
US7255632B2Aug 14, 2007
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
APPLIED MATERIALS INC13 citations93
US7097544B1Aug 29, 2006
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
APPLIED MATERIALS INC18 citations93
US6648740B2Nov 18, 2003
Carrier head with a flexible membrane to form multiple chambers
APPLIED MATERIALS INC22 citations93
US6506104B2Jan 14, 2003
Carrier head with a flexible membrane
APPLIED MATERIALS INC16 citations93
US6293853B1Sep 25, 2001
Conditioner apparatus for chemical mechanical polishing
APPLIED MATERIALS INC26 citations93
US6277010B1Aug 21, 2001
Carrier head with a flexible membrane for a chemical mechanical polishing system
APPLIED MATERIALS INC18 citations93
US6143127ANov 7, 2000
Carrier head with a retaining ring for a chemical mechanical polishing system
APPLIED MATERIALS INC51 citations93
US6106378AAug 22, 2000
Carrier head with a flexible membrane for a chemical mechanical polishing system
APPLIED MATERIALS INC44 citations93
US6036583AMar 14, 2000
Conditioner head in a substrate polisher and method
APPLIED MATERIALS INC39 citations93
US5931724AAug 3, 1999
Mechanical fastener to hold a polishing pad on a platen in a chemical mechanical polishing system
APPLIED MATERIALS INC40 citations93
US5893795AApr 13, 1999
Apparatus for moving a cassette
APPLIED MATERIALS INC50 citations93
US6374508B1Apr 23, 2002
Apparatus and method for aligning a substrate on a support member
APPLIED MATERIALS INC20 citations92
US6393337B1May 21, 2002
Method and apparatus for orienting substrates
APPLIED MATERIALS INC18 citations90
US7238090B2Jul 3, 2007
Polishing apparatus having a trough
APPLIED MATERIALS INC10 citations84
US6532866B2Mar 18, 2003
Method and apparatus for orienting substrates
APPLIED MATERIALS INC3 citations60