Inventor
SVIRCHEVSKI JULIA S
US6 patents
Patents
6 patentsUS6543084B2Apr 8, 2003
Wafer scrubbing brush core
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US6240588B1Jun 5, 2001
Wafer scrubbing brush core
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US6994611B2Feb 7, 2006
Method and system for cleaning a chemical mechanical polishing pad
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US6405399B1Jun 18, 2002
Method and system of cleaning a wafer after chemical mechanical polishing or plasma processing
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US6352595B1Mar 5, 2002
Method and system for cleaning a chemical mechanical polishing pad
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US7270597B2Sep 18, 2007
Method and system for chemical mechanical polishing pad cleaning
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