Inventor

TREICHEL HELMUTH W

US3 patents

Patents

3 patents

US6187684B1Feb 13, 2001

Methods for cleaning substrate surfaces after etch operations

LAM RES CORP71 citations92

US6543084B2Apr 8, 2003

Wafer scrubbing brush core

LAM RES CORP20 citations90

US6240588B1Jun 5, 2001

Wafer scrubbing brush core

LAM RES CORP34 citations90