Inventor
PASCAL ROY WINSTON
US8 patents
⚠️ This page may combine multiple inventors who share the name “PASCAL ROY WINSTON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS6415804B1Jul 9, 2002
Bowl for processing semiconductor wafers
LAM RES CORP23 citations91
US6543084B2Apr 8, 2003
Wafer scrubbing brush core
LAM RES CORP20 citations90
US6240588B1Jun 5, 2001
Wafer scrubbing brush core
LAM RES CORP34 citations90
US6612315B2Sep 2, 2003
Bowl, spin, rinse, and dry module, and method for loading a semiconductor wafer into a spin, rinse, and dry module
LAM RES CORP9 citations72
US6497241B1Dec 24, 2002
Hollow core spindle and spin, rinse, and dry module including the same
LAM RES CORP12 citations71
US6505417B2Jan 14, 2003
Method for controlling airflow on a backside of a semiconductor wafer during spin processing
LAM RES CORP2 citations61
US6558474B1May 6, 2003
Method for rinsing the backside of a semiconductor wafer
LAM RES CORP1 citations50