Inventor
YANG CHARLES CHIUN-CHIEH
US6 patents
⚠️ This page may combine multiple inventors who share the name “YANG CHARLES CHIUN-CHIEH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MEMC ELECTRONIC MATERIALS
5 patentsUS6444027B1Sep 3, 2002
Modified susceptor for use in chemical vapor deposition process
MEMC ELECTRONIC MATERIALS82 citations96
US6596095B2Jul 22, 2003
Epitaxial silicon wafer free from autodoping and backside halo and a method and apparatus for the preparation thereof
MEMC ELECTRONIC MATERIALS42 citations94
US6652650B2Nov 25, 2003
Modified susceptor for use in chemical vapor deposition process
MEMC ELECTRONIC MATERIALS35 citations91
US6599815B1Jul 29, 2003
Method and apparatus for forming a silicon wafer with a denuded zone
MEMC ELECTRONIC MATERIALS24 citations90
US6666915B2Dec 23, 2003
Method for the preparation of an epitaxial silicon wafer with intrinsic gettering
MEMC ELECTRONIC MATERIALS26 citations85