P

Inventor

TANAKA KOICHIRO

JP502 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA KOICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEMICONDUCTOR ENERGY LAB

42 patents
US6974731B2Dec 13, 2005

Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device

SEMICONDUCTOR ENERGY LAB135 citations99
US6753212B2Jun 22, 2004

Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device

SEMICONDUCTOR ENERGY LAB117 citations99
US6730550B1May 4, 2004

Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device

SEMICONDUCTOR ENERGY LAB132 citations99
US6693257B1Feb 17, 2004

Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device

SEMICONDUCTOR ENERGY LAB114 citations99
US6535535B1Mar 18, 2003

Laser irradiation method, laser irradiation apparatus, and semiconductor device

SEMICONDUCTOR ENERGY LAB141 citations99
US6528359B2Mar 4, 2003

Laser annealing method and laser annealing device

SEMICONDUCTOR ENERGY LAB135 citations99
US6393042B1May 21, 2002

Beam homogenizer and laser irradiation apparatus

SEMICONDUCTOR ENERGY LAB247 citations99
US6353218B1Mar 5, 2002

Laser illumination apparatus with beam dividing and combining performances

SEMICONDUCTOR ENERGY LAB109 citations99
US6300176B1Oct 9, 2001

Laser processing method

SEMICONDUCTOR ENERGY LAB128 citations99
US6291320B1Sep 18, 2001

Method of manufacturing a semiconductor device utilizing a line-shaped laser beam

SEMICONDUCTOR ENERGY LAB89 citations99
US6251712B1Jun 26, 2001

Method of using phosphorous to getter crystallization catalyst in a p-type device

SEMICONDUCTOR ENERGY LAB182 citations99
US6242292B1Jun 5, 2001

Method of producing a semiconductor device with overlapped scanned linear lasers

SEMICONDUCTOR ENERGY LAB127 citations99
US6242291B1Jun 5, 2001

Laser annealing method and laser annealing device

SEMICONDUCTOR ENERGY LAB180 citations99
US6239913B1May 29, 2001

Laser optical apparatus

SEMICONDUCTOR ENERGY LAB131 citations99
US6215595B1Apr 10, 2001

Apparatus and method for laser radiation

SEMICONDUCTOR ENERGY LAB100 citations99
US6212012B1Apr 3, 2001

Laser optical apparatus

SEMICONDUCTOR ENERGY LAB138 citations99
US6210996B1Apr 3, 2001

Laser illumination system

SEMICONDUCTOR ENERGY LAB156 citations99
US6156997ADec 5, 2000

Laser processing method and laser processing apparatus

SEMICONDUCTOR ENERGY LAB121 citations99
US6038075AMar 14, 2000

Laser irradiation apparatus

SEMICONDUCTOR ENERGY LAB165 citations99
US6002523ADec 14, 1999

Laser illumination method

SEMICONDUCTOR ENERGY LAB193 citations99
US5959779ASep 28, 1999

Laser irradiation apparatus

SEMICONDUCTOR ENERGY LAB158 citations99
US5900980AMay 4, 1999

Apparatus and method for laser radiation

SEMICONDUCTOR ENERGY LAB169 citations99
US5893990AApr 13, 1999

Laser processing method

SEMICONDUCTOR ENERGY LAB193 citations99
US5854803ADec 29, 1998

Laser illumination system

SEMICONDUCTOR ENERGY LAB216 citations99
US5815494ASep 29, 1998

Laser irradiation apparatus and laser irradiation method

SEMICONDUCTOR ENERGY LAB160 citations99
US5756364AMay 26, 1998

Laser processing method of semiconductor device using a catalyst

SEMICONDUCTOR ENERGY LAB312 citations99
US7282380B2Oct 16, 2007

Method for manufacturing semiconductor device

SEMICONDUCTOR ENERGY LAB71 citations98
US7078281B2Jul 18, 2006

Method of manufacturing a semiconductor device by providing a mirror in the attenuation region

SEMICONDUCTOR ENERGY LAB69 citations98
US7056810B2Jun 6, 2006

Method for manufacturing semiconductor apparatus, and semiconductor apparatus and electric appliance

SEMICONDUCTOR ENERGY LAB76 citations98
US6961361B1Nov 1, 2005

Laser irradiation apparatus

SEMICONDUCTOR ENERGY LAB71 citations98
US6750424B2Jun 15, 2004

Beam homogenizer, laser irradiation apparatus, laser irradiation method, and method of manufacturing semiconductor device

SEMICONDUCTOR ENERGY LAB104 citations98
US6750423B2Jun 15, 2004

Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device

SEMICONDUCTOR ENERGY LAB71 citations98
US6700096B2Mar 2, 2004

Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment

SEMICONDUCTOR ENERGY LAB100 citations98
US6650480B2Nov 18, 2003

Method of processing beam, laser irradiation apparatus, and method of manufacturing semiconductor device

SEMICONDUCTOR ENERGY LAB75 citations98
US6567219B1May 20, 2003

Laser irradiation apparatus

SEMICONDUCTOR ENERGY LAB102 citations98
US6563843B1May 13, 2003

Laser irradiation device

SEMICONDUCTOR ENERGY LAB77 citations98
US6524977B1Feb 25, 2003

Method of laser annealing using linear beam having quasi-trapezoidal energy profile for increased depth of focus

SEMICONDUCTOR ENERGY LAB108 citations98
US6516009B1Feb 4, 2003

Laser irradiating device and laser irradiating method

SEMICONDUCTOR ENERGY LAB113 citations98
US6512634B2Jan 28, 2003

Beam homogenizer, laser illumination apparatus and method, and semiconductor device

SEMICONDUCTOR ENERGY LAB94 citations98
US6392810B1May 21, 2002

Laser irradiation apparatus, laser irradiation method, beam homogenizer, semiconductor device, and method of manufacturing the semiconductor device

SEMICONDUCTOR ENERGY LAB135 citations98
US6246524B1Jun 12, 2001

Beam homogenizer, laser irradiation apparatus, laser irradiation method, and method of manufacturing semiconductor device

SEMICONDUCTOR ENERGY LAB98 citations98
US6176926B1Jan 23, 2001

Laser processing method

SEMICONDUCTOR ENERGY LAB86 citations98

CANON KK

3 patents

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

3 patents

TANAKA KOICHIRO

1 patent

(unassigned)

1 patent

Showing the top 50 of 502 patents by PatentIndex Score.