Inventor
TAKASU RYOICHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “TAKASU RYOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
9 patentsUS7371510B2May 13, 2008
Material for forming resist protecting film for use in liquid immersion lithography process, composite film, and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD44 citations92
US6936400B2Aug 30, 2005
Negative resist composition
TOKYO OHKA KOGYO CO LTD40 citations92
US7527909B2May 5, 2009
Resist composition
TOKYO OHKA KOGYO CO LTD9 citations84
US7501220B2Mar 10, 2009
Resist composition
TOKYO OHKA KOGYO CO LTD9 citations84
US7989138B2Aug 2, 2011
Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD7 citations83
US7541138B2Jun 2, 2009
Resist composition
TOKYO OHKA KOGYO CO LTD6 citations73
US7326512B2Feb 5, 2008
Polymer compound, resist composition and dissolution inhibitor agent containing the polymer compound
TOKYO OHKA KOGYO CO LTD4 citations62
US7914967B2Mar 29, 2011
Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD1 citations51
US7914968B2Mar 29, 2011
Positive resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations40