Inventor
TACHIKAWA TOSHIKAZU
JP21 patents
⚠️ This page may combine multiple inventors who share the name “TACHIKAWA TOSHIKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
16 patentsUS6936400B2Aug 30, 2005
Negative resist composition
TOKYO OHKA KOGYO CO LTD40 citations92
US6811817B2Nov 2, 2004
Method for reducing pattern dimension in photoresist layer
TOKYO OHKA KOGYO CO LTD47 citations92
US6406829B1Jun 18, 2002
Negative-working photoresist composition
TOKYO OHKA KOGYO CO LTD44 citations92
US7527909B2May 5, 2009
Resist composition
TOKYO OHKA KOGYO CO LTD9 citations84
US7501220B2Mar 10, 2009
Resist composition
TOKYO OHKA KOGYO CO LTD9 citations84
US7189499B2Mar 13, 2007
Method of forming fine patterns
TOKYO OHKA KOGYO CO LTD15 citations84
US6171749B1Jan 9, 2001
Negative-working chemical-amplification photoresist composition
TOKYO OHKA KOGYO CO LTD12 citations74
US5928837AJul 27, 1999
Negative-working chemical-sensitization photoresist composition comprising oxime sulfonate compounds
TOKYO OHKA KOGYO CO LTD14 citations74
US7541138B2Jun 2, 2009
Resist composition
TOKYO OHKA KOGYO CO LTD6 citations73
US7235345B2Jun 26, 2007
Agent for forming coating for narrowing patterns and method for forming fine pattern using the same
TOKYO OHKA KOGYO CO LTD9 citations73
US6455228B1Sep 24, 2002
Multilayered body for photolithographic patterning
TOKYO OHKA KOGYO CO LTD13 citations73
US7553610B2Jun 30, 2009
Method of forming fine patterns
TOKYO OHKA KOGYO CO LTD6 citations62
US6544712B1Apr 8, 2003
Negative working resist composition
TOKYO OHKA KOGYO CO LTD5 citations62
US8043798B2Oct 25, 2011
Method of forming fine patterns
TOKYO OHKA KOGYO CO LTD0 citations52
US7033731B2Apr 25, 2006
Multilayered body for photolithographic patterning
TOKYO OHKA KOGYO CO LTD0 citations51
US6864036B2Mar 8, 2005
Negative-working photoresist composition
TOKYO OHKA KOGYO CO LTD1 citations51
SUGETA YOSHIKI
3 patentsUS8124318B2Feb 28, 2012
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
SUGETA YOSHIKI2 citations60
US8187798B2May 29, 2012
Method of forming fine patterns
SUGETA YOSHIKI0 citations49
US8142980B2Mar 27, 2012
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
SUGETA YOSHIKI0 citations48