Inventor
IWASHITA JUN
JP27 patents
⚠️ This page may combine multiple inventors who share the name “IWASHITA JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
16 patentsUS7709179B2May 4, 2010
Negative resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD22 citations92
US6936400B2Aug 30, 2005
Negative resist composition
TOKYO OHKA KOGYO CO LTD40 citations92
US7527909B2May 5, 2009
Resist composition
TOKYO OHKA KOGYO CO LTD9 citations84
US7501220B2Mar 10, 2009
Resist composition
TOKYO OHKA KOGYO CO LTD9 citations84
US8883396B2Nov 11, 2014
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD7 citations83
US8795948B2Aug 5, 2014
Resist composition, method of forming resist pattern and polymeric compound
TOKYO OHKA KOGYO CO LTD12 citations83
US7541138B2Jun 2, 2009
Resist composition
TOKYO OHKA KOGYO CO LTD6 citations73
US8778595B2Jul 15, 2014
Resist composition, method of forming resist pattern, and polymeric compound
TOKYO OHKA KOGYO CO LTD2 citations62
US8043795B2Oct 25, 2011
Method of forming resist pattern
TOKYO OHKA KOGYO CO LTD4 citations62
US8034536B2Oct 11, 2011
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD4 citations61
US7598017B2Oct 6, 2009
Negative resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations61
US7820360B2Oct 26, 2010
Polymer compound, negative resist composition, and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations55
US8021824B2Sep 20, 2011
Polymer compound, resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD1 citations51
US7939243B2May 10, 2011
Resin, resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
US9057948B2Jun 16, 2015
Resist composition for EUV or EB, and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations41
US7582409B2Sep 1, 2009
Negative resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations34
IWASHITA JUN
3 patentsUS8232040B2Jul 31, 2012
Positive resist composition and method of forming resist pattern
IWASHITA JUN0 citations46
US9618843B2Apr 11, 2017
Resist composition and method of forming resist pattern
IWASHITA JUN0 citations37
US8586281B2Nov 19, 2013
Positive resist composition and method of forming resist pattern
IWASHITA JUN0 citations36
UTSUMI YOSHIYUKI
2 patentsUS8268530B2Sep 18, 2012
Positive resist composition, method of forming resist pattern, polymeric compound, and compound
UTSUMI YOSHIYUKI2 citations62
US9097971B2Aug 4, 2015
Compound, radical polymerization initiator, method for producing compound, polymer, resist composition, and method for forming resist pattern
UTSUMI YOSHIYUKI0 citations40