Inventor
YAMADA TOMOTAKA
JP16 patents
⚠️ This page may combine multiple inventors who share the name “YAMADA TOMOTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
13 patentsUS6340553B1Jan 22, 2002
Positive-working photoresist composition
TOKYO OHKA KOGYO CO LTD26 citations92
US7527909B2May 5, 2009
Resist composition
TOKYO OHKA KOGYO CO LTD9 citations84
US7501220B2Mar 10, 2009
Resist composition
TOKYO OHKA KOGYO CO LTD9 citations84
US6630282B2Oct 7, 2003
Crosslinked positive-working photoresist composition
TOKYO OHKA KOGYO CO LTD14 citations83
US7541138B2Jun 2, 2009
Resist composition
TOKYO OHKA KOGYO CO LTD6 citations73
US6818380B2Nov 16, 2004
Method for the preparation of a semiconductor device
TOKYO OHKA KOGYO CO LTD4 citations62
US6777158B2Aug 17, 2004
Method for the preparation of a semiconductor device
TOKYO OHKA KOGYO CO LTD3 citations62
US6485887B2Nov 26, 2002
Positive-working photoresist composition
TOKYO OHKA KOGYO CO LTD4 citations62
US10261416B2Apr 16, 2019
Resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD1 citations61
US7416832B2Aug 26, 2008
Positive resist composition
TOKYO OHKA KOGYO CO LTD4 citations60
US7318992B2Jan 15, 2008
Lift-off positive resist composition
TOKYO OHKA KOGYO CO LTD6 citations60
US7261994B2Aug 28, 2007
Positive resist composition
TOKYO OHKA KOGYO CO LTD4 citations60
US9170487B2Oct 27, 2015
Resist composition, method of forming resist pattern, and polymeric compound
TOKYO OHKA KOGYO CO LTD0 citations52