Inventor

WAKUDA MARIKO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “WAKUDA MARIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMCO TECHXIV CORP

1 patent

US7686891B2Mar 30, 2010

Method and apparatus for collecting chemicals from semiconductor wafer

SUMCO TECHXIV CORP1 citations45

WAKUDA MARIKO

1 patent

US8080113B2Dec 20, 2011

Method and apparatus for collecting chemicals from semiconductor wafer

WAKUDA MARIKO0 citations38