Inventor
KURIYAMA NOBORU
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KURIYAMA NOBORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIBAURA MECHATRONICS CORP
8 patentsUS7301286B2Nov 27, 2007
Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge
SHIBAURA MECHATRONICS CORP33 citations95
US6416638B1Jul 9, 2002
Power supply unit for sputtering device
SHIBAURA MECHATRONICS CORP67 citations94
US6113760ASep 5, 2000
Power supply apparatus for sputtering and a sputtering apparatus using the power supply apparatus
SHIBAURA MECHATRONICS CORP23 citations84
US7531070B2May 12, 2009
Sputtering power-supply unit
SHIBAURA MECHATRONICS CORP10 citations79
US7695599B2Apr 13, 2010
Discharging power source, sputtering power source, and sputtering device
SHIBAURA MECHATRONICS CORP2 citations57
US7880403B2Feb 1, 2011
Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge
SHIBAURA MECHATRONICS CORP0 citations51
US7633242B2Dec 15, 2009
Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge
SHIBAURA MECHATRONICS CORP0 citations51
US7492105B2Feb 17, 2009
Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge
SHIBAURA MECHATRONICS CORP0 citations51