Inventor
HILL HENRY A
US102 patents
⚠️ This page may combine multiple inventors who share the name “HILL HENRY A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZYGO CORP
39 patentsUS6313918B1Nov 6, 2001
Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion
ZYGO CORP130 citations99
US6271923B1Aug 7, 2001
Interferometry system having a dynamic beam steering assembly for measuring angle and distance
ZYGO CORP174 citations99
US6888638B1May 3, 2005
Interferometry system having a dynamic beam steering assembly for measuring angle and distance
ZYGO CORP70 citations98
US6847452B2Jan 25, 2005
Passive zero shear interferometers
ZYGO CORP80 citations98
US6541759B1Apr 1, 2003
Interferometry system having a dynamic beam-steering assembly for measuring angle and distance and employing optical fibers for remote photoelectric detection
ZYGO CORP80 citations98
US6252668B1Jun 26, 2001
Systems and methods for quantifying nonlinearities in interferometry systems
ZYGO CORP106 citations98
US6252667B1Jun 26, 2001
Interferometer having a dynamic beam steering assembly
ZYGO CORP101 citations98
US6246481B1Jun 12, 2001
Systems and methods for quantifying nonlinearities in interferometry systems
ZYGO CORP99 citations98
US6137574AOct 24, 2000
Systems and methods for characterizing and correcting cyclic errors in distance measuring and dispersion interferometry
ZYGO CORP148 citations98
US7283248B2Oct 16, 2007
Multi-axis interferometers and methods and systems using multi-axis interferometers
ZYGO CORP44 citations96
US6842256B2Jan 11, 2005
Compensating for effects of variations in gas refractivity in interferometers
ZYGO CORP55 citations96
US6806961B2Oct 19, 2004
Interferometric cyclic error compensation
ZYGO CORP58 citations96
US6757066B2Jun 29, 2004
Multiple degree of freedom interferometer
ZYGO CORP67 citations96
US6529279B2Mar 4, 2003
Interferometer and method for measuring the refractive index and optical path length effects of air
ZYGO CORP43 citations96
US6525825B2Feb 25, 2003
Interferometer and method for measuring the refractive index and optical path length effects of air
ZYGO CORP47 citations96
US6327039B1Dec 4, 2001
Interferometer and method for measuring the refractive index and optical path length effects of air
ZYGO CORP73 citations96
US6236507B1May 22, 2001
Apparatus to transform two nonparallel propagating optical beam components into two orthogonally polarized beam components
ZYGO CORP80 citations96
US5838485ANov 17, 1998
Superheterodyne interferometer and method for compensating the refractive index of air using electronic frequency multiplication
ZYGO CORP74 citations96
US7697195B2Apr 13, 2010
Apparatus for reducing wavefront errors in output beams of acousto-optic devices
ZYGO CORP20 citations93
US6987569B2Jan 17, 2006
Dynamic interferometer controlling direction of input beam
ZYGO CORP29 citations93
US6950192B2Sep 27, 2005
Cyclic error compensation in interferometry systems
ZYGO CORP27 citations93
US6912054B2Jun 28, 2005
Interferometric stage system
ZYGO CORP24 citations93
US6906784B2Jun 14, 2005
Spatial filtering in interferometry
ZYGO CORP18 citations93
US6891624B2May 10, 2005
Cyclic error reduction in average interferometric position measurements
ZYGO CORP37 citations93
US6882430B2Apr 19, 2005
Spatial filtering in interferometry
ZYGO CORP18 citations93
US6839141B2Jan 4, 2005
Method and apparatus for compensation of time-varying optical properties of gas in interferometry
ZYGO CORP51 citations93
US6819434B2Nov 16, 2004
Multi-axis interferometer
ZYGO CORP37 citations93
US6791693B2Sep 14, 2004
Multiple-pass interferometry
ZYGO CORP30 citations93
US6778280B2Aug 17, 2004
Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components
ZYGO CORP48 citations93
US6762845B2Jul 13, 2004
Multiple-pass interferometry
ZYGO CORP28 citations93
US6747744B2Jun 8, 2004
Interferometric servo control system for stage metrology
ZYGO CORP21 citations93
US6631004B1Oct 7, 2003
Single-pass and multi-pass interferometry systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion
ZYGO CORP31 citations93
US6525826B2Feb 25, 2003
Interferometer and method for measuring the refractive index and optical path length effects of air
ZYGO CORP22 citations92
US6407816B1Jun 18, 2002
Interferometer and method for measuring the refractive index and optical path length effects of air
ZYGO CORP32 citations92
US7528961B2May 5, 2009
Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers
ZYGO CORP11 citations84
US7428685B2Sep 23, 2008
Cyclic error compensation in interferometry systems
ZYGO CORP9 citations84
US7382466B2Jun 3, 2008
Coating for reflective optical components
ZYGO CORP9 citations84
US7379190B2May 27, 2008
Stage alignment in lithography tools
ZYGO CORP13 citations84
US7330274B2Feb 12, 2008
Compensation for geometric effects of beam misalignments in plane mirror interferometers
ZYGO CORP9 citations84
ZETETIC INST
11 patentsUS6480285B1Nov 12, 2002
Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation
ZETETIC INST227 citations99
US6091496AJul 18, 2000
Multiple layer, multiple track optical disk access by confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation
ZETETIC INST305 citations99
US5760901AJun 2, 1998
Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation
ZETETIC INST165 citations99
US6775009B2Aug 10, 2004
Differential interferometric scanning near-field confocal microscopy
ZETETIC INST94 citations98
US6717736B1Apr 6, 2004
Catoptric and catadioptric imaging systems
ZETETIC INST61 citations96
US6847029B2Jan 25, 2005
Multiple-source arrays with optical transmission enhanced by resonant cavities
ZETETIC INST51 citations93
US6667809B2Dec 23, 2003
Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation
ZETETIC INST52 citations93
US6552852B2Apr 22, 2003
Catoptric and catadioptric imaging systems
ZETETIC INST51 citations93
US6552805B2Apr 22, 2003
Control of position and orientation of sub-wavelength aperture array in near-field microscopy
ZETETIC INST52 citations93
US5915048AJun 22, 1999
Method and apparatus for discriminating in-focus images from out-of-focus light signals from background and foreground light sources
ZETETIC INST97 citations92
US7460245B2Dec 2, 2008
Apparatus and method for measurement and compensation of atmospheric turbulence effects in wavefront interferometry
ZETETIC INST14 citations84
Showing the top 50 of 102 patents by PatentIndex Score.