Inventor
SHNEYDER DMITRIY
US12 patents
⚠️ This page may combine multiple inventors who share the name “SHNEYDER DMITRIY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
10 patentsUS7446859B2Nov 4, 2008
Apparatus and method for reducing contamination in immersion lithography
IBM6 citations73
US7407554B2Aug 5, 2008
Development or removal of block copolymer or PMMA-b-S-based resist using polar supercritical solvent
IBM6 citations73
US7645694B2Jan 12, 2010
Development or removal of block copolymer or PMMA-b-S-based resist using polar supercritical solvent
IBM4 citations62
US7869002B2Jan 11, 2011
Reducing contamination in immersion lithography
IBM3 citations60
US7782445B2Aug 24, 2010
Reducing contamination in immersion lithography
IBM2 citations60
US7535349B2May 19, 2009
Determining root cause for alarm in processing system
IBM3 citations59
US7787101B2Aug 31, 2010
Apparatus and method for reducing contamination in immersion lithography
IBM0 citations52
US7569112B2Aug 4, 2009
Scanning probe apparatus with in-situ measurement probe tip cleaning capability
IBM1 citations51
US7807335B2Oct 5, 2010
Immersion lithography contamination gettering layer
IBM1 citations50
US8347741B2Jan 8, 2013
Specimen handling apparatus
IBM0 citations42