Inventor
BOROVIK ALEXANDER S
US13 patents
⚠️ This page may combine multiple inventors who share the name “BOROVIK ALEXANDER S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
9 patentsUS7108771B2Sep 19, 2006
Method for removal of impurities in cyclic siloxanes useful as precursors for low dielectric constant thin films
ADVANCED TECH MATERIALS24 citations90
US7084080B2Aug 1, 2006
Silicon source reagent compositions, and method of making and using same for microelectronic device structure
ADVANCED TECH MATERIALS16 citations84
US7022864B2Apr 4, 2006
Ethyleneoxide-silane and bridged silane precursors for forming low k films
ADVANCED TECH MATERIALS12 citations79
US7423166B2Sep 9, 2008
Stabilized cyclosiloxanes for use as CVD precursors for low-dielectric constant thin films
ADVANCED TECH MATERIALS8 citations73
US7189571B1Mar 13, 2007
Method for trace water analysis in cyclic siloxanes useful as precursors for low dielectric constant thin films
ADVANCED TECH MATERIALS6 citations73
US7531031B2May 12, 2009
Copper (I) compounds useful as deposition precursors of copper thin films
ADVANCED TECH MATERIALS2 citations62
US7342295B2Mar 11, 2008
Porogen material
ADVANCED TECH MATERIALS3 citations62
US7456488B2Nov 25, 2008
Porogen material
ADVANCED TECH MATERIALS1 citations52
US7439318B2Oct 21, 2008
Method for trace water analysis in cyclic siloxanes useful as precursors for low dielectric constant thin films
ADVANCED TECH MATERIALS0 citations52
MOMENTIVE PERFORMANCE MAT INC
2 patentsUS7875318B2Jan 25, 2011
Method of applying an anti-corrosion and/or adhesion promoting coating to a metal and resulting coated metal
MOMENTIVE PERFORMANCE MAT INC8 citations82
US7989651B2Aug 2, 2011
Epoxysilanes, processes for their manufacture and curable compositions containing same
MOMENTIVE PERFORMANCE MAT INC1 citations49